Bronkhorst and PHIX partner to enable volume manufacturing of sensors for mass flow controllers

June 30th 2021

PHIX has partnered with Dutch flow meter/controller manufacturer Bronkhorst High-Tech B.V. to enable volume manufacturing of thermal mass flow sensors using PHIX’s micro-assembly know-how and technology.

While Bronkhorst’s expertise is to develop a highly dedicated MEMS-based chip to measure flow in its mass flow meters and controllers, PHIX is servicing Bronkhorst with process development and contract manufacturing to manufacture these sensors in volume with the highest possible accuracy and repeatability. The assembly of MEMS (micro-electromechanical systems) into functional modules involves similar equipment and processes to those used in the packaging of photonic integrated circuits (PICs), such as wire bonding and flip chip assembly. This has allowed PHIX to develop processes for Bronkhorst that meet the required quality standards for these very precise mass flow sensors.

bronkhorst mass flow sensors

A selection of mass flow controllers developed by Bronkhorst. Image courtesy of Bronkhorst High-Tech B.V.

This kind of cooperation helps us demonstrate our ability to contribute to the scale-up of highly dedicated and precise sensors in a very repeatable way. By using our automated and accurate equipment we were able to develop a production flow for volume manufacturing of these sensors. We are very proud that Bronkhorst worked with us closely to enable this development!

Albert Hasper


Business partners like PHIX not only know their trade very well, but also enable us to explore new and uncharted ways in developing novel sensors, both from the point of view of technology pathfinding as well as manufacturability and cost effectiveness. We are enjoying great synergy today and look forward to many future projects.

Henk Tappel

Innovation Director, Bronkhorst